Case Study 6

Precision Quartz Handling

A semiconductor component manufacturer needed to automate the handling and loading of precision quartz rings into CNC equipment. The application required highly controlled motion and precise final positioning, as vibration or misalignment during insertion could damage the delicate components and result in costly scrap and production downtime.

Precision quartz component handling automation
Precision quartz component handling automation.

Background

The manufacturer produces precision quartz components used in semiconductor manufacturing. In this application, delicate quartz rings must be loaded into specialized tool holders on two CNC machines.

The process requires a combination of precise positioning, vibration-free motion, and controlled compliance during final engagement. The required total placement accuracy was ±0.02 mm (20 microns).

Previously, the operation was performed manually by skilled operators. A previous automation attempt also failed to meet the application's requirements for positioning accuracy and controlled insertion.

Key Challenges

  1. 20-micron positioning accuracy. The system required total placement accuracy of ±0.02 mm.
  2. Fragile components. Improper handling, vibration, or misalignment could damage the quartz rings.
  3. Controlled insertion. The robot needed to engage with the tool holder using compliant, controlled motion.
  4. Vibration-free approach. Smooth deceleration was required near the final insertion point.
  5. Labor dependency. The process previously required skilled operators for manual placement across multiple shifts.

Deployed Robot Solution

Neuromeka deployed a Nuri20 collaborative robot with a custom spindle-equipped end-effector and force/compliance control to automate the loading process.

The system combines precise robot motion with controlled compliance during final insertion, allowing the robot to approach, align, and engage the quartz component with minimal vibration.

The Nuri20 performs the following process:

  1. Pick Up Component. The robot picks up a quartz ring using the custom spindle-equipped end-effector.
  2. Move to CNC Machine. It moves the component toward the CNC machine using controlled, vibration-free motion.
  3. Approach Tool Holder. The robot approaches the tool holder and begins the insertion process.
  4. Compliant Engagement. Compliance control allows the robot to accommodate small positional differences during final engagement.
  5. Seat Component. The component is aligned and seated in the final position.
  6. Release and Retract. The robot releases the component and retracts.
  7. Repeat for Second Machine. The process is repeated for the second CNC machine.
Quartz handling automation solution in operation

Results

FeatureSpecification
RobotNuri20
Payload20 kg
Reach1.7 m
Robot Repeatability0.5 mm
Total Placement Accuracy±0.02 mm
CNC Machines2
End-EffectorCustom spindle-equipped gripper with compliant insertion control

Automation Benefits

  1. Met Precision Requirements. The automated system met the application's 20-micron total placement accuracy requirement while providing controlled, repeatable insertion of the fragile quartz components.
  2. Reduced Scrap. The customer reported an approximately 80% reduction in scrap, helping reduce material waste and the cost associated with part rejection.
  3. Reduced Labor Dependency. The system automated a process that previously required skilled manual labor, enabling operation across two shifts with minimal human intervention.
  4. Fast Payback. Based on reduced labor requirements and lower scrap rates, the customer achieved an estimated payback period of approximately one year.

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